Assisted cubic to hexagonal phase transition in GeSbTe thin films on silicon nitride

K Cil, Y Zhu, Jing Li, CH Lam, H Silva
DOI
Type
Journal article
Publication
Thin Solid Films, 536, 216–219
phase change memory germanium–antimony–tellurium phase transition temperature face-centered cubic hexagonal close-packed substrate dependence silicon nitride silicon dioxide